ڳV^е˹Ĥһɸ߷Ӳ磺wSwSϩƳһAƳɹʽʽʽëʽȸNʽĤMȻMbMһ^VeھS
VĤһNڳV^܌һСĸ߷zwҸwҺзxĸ߷ӰĤ ԉĤ1100nmٷnjQĤܶ͡ȼs10/cm1001000kPamÓzwʹܷxС10%Һ
Y
@N߷ӾۺĤвQY֞ɌӣόӞ鹦܌ӣ͔rشӵĹܣ120nmӾдͨY֧ΌĤȵá
܌^ˮͨһƳɹʽʽʽëʽȸN͵ĽMȻMbMһ^VeĤijV^ڱ|ǙCеYV^̣Ĥ϶ĴСҪĿ^VĤܷx|(߷ӻw)130nmСķӣų|Ĥ⣬߀c|ӵΠСȼlPڵijVĤòwSĤ
ͨɸN߷ӲƳwSwSϩԼۺȡ
I
VĤяVڹIUˮˇˮ̎绯ʳƷtˎIд|ĝsͷxҺijӡȾUˮȾϵķxʯͻUˮлոWUˮлyԼˮƂ⣬߀sÓˮ
ܱ
üˮˮƽסСrͽͽٷʱʾˮ^ԽԽһҪ>99%|ijVĤܶȺֲܴխ



